![[SRA] Spread Resistance Measurement Method](https://image.mono.ipros.com/public/product/image/0ee/2000240835/IPROS52056165833840874589.jpeg?w=280&h=280)
[SRA] Spread Resistance Measurement Method
SRA：Spreading Resistance Analysis
SRA is a method that involves diagonally polishing the measurement sample, making contact with two probes on the polished surface, and measuring the spreading resistance. It is also referred to as SRP (Spreading Resistance Profiling). - It is possible to determine the conductivity type (p-type/n-type). - It allows for the evaluation of carrier concentration distribution in the depth direction. - It can analyze a wide range of carrier concentrations from approximately 1E12 to 2E20 /cm3. - It is capable of measuring patterned samples larger than approximately 20μm × 100μm. - By combining SRA with SIMS for evaluation, it is possible to assess the activation rate.
- Company：一般財団法人材料科学技術振興財団 MST
- Price：Other
